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189-2649-3933
address:E building,Hongyuan Area,HuaChang Rd.Dalan Street,Bao’an Area,Shenzhen
tel:+86-755-28035588
+86 18926493933
tax:+86-755-28035088
email:sz008@vip.163.com
Advantages of FPAG chip:
It is composed of logic unit, RAM, multiplier and other hardware resources. By organizing these hardware resources reasonably, the multiplier, register address generator and other hardware circuits can be realized.
Chip cleaning In the semiconductor industry, about cleaning is a very important step, from gravel to chip, "point stone core" will mainly experience silicon wafer manufacturing, wafer manufacturing, chip packaging and chip testing several major processes, cleaning is through the whole industry chain of chip manufacturing, is also the most repeated process.
The described processes include three types:
Silicon wafer manufacturing process: clean and polished silicon wafers to ensure surface smoothness and performance, and improve the yield of subsequent processes.
Wafer manufacturing process: Clean before and after key processes such as lithography, etching, deposition, ion implantation, and gumming to reduce defect rate.
Chip packaging process: TSV cleaning, UBM/RDL cleaning, bonding cleaning, etc., according to the packaging process.
The VGT-1609FP optical ultrasonic cleaning machine can meet the following requirements after cleaning the chip:
1, no residual dry spots and stains;
2, there will be no white, blue and other chemical deterioration, there will be no dark damage and other physical deterioration.
Basic principle of cleaning equipment:
During the cleaning process, the workpiece is affected by the "gasification phenomenon" generated by the ultrasonic high frequency and the system itself constantly moves up and down, increasing the friction of the liquid, so that the dirt on the surface of the workpiece can be quickly shed to achieve its high cleanliness.
Wigood VGT-1609FP Optical Ultrasonic cleaning machine General configuration:
The equipment has 16 functional tanks, equipped with environmental protection liquid treatment system, circulation filtration system, automatic constant temperature system, throwing system, ultrasonic cleaning system, air extraction device, IPA rinsing system, IPA drying system, etc. The equipment adopts environment-friendly water solvent washing, pure water rinsing, IPA drying (explosion-proof) and other mature processes, which is an environment-friendly cleaning machine.
Cleaning process:
Feeding → Distillation recovery system →1 environmental protection liquid →2 environmental protection liquid →3 environmental protection liquid →4 environmental protection liquid →5 detergent cleaning →6 detergent cleaning →7 market water rinsing →8 detergent cleaning →9 detergent cleaning →10 pure water rinsing →11 pure water rinsing →12 pure water rinsing →13IPA rinsing →14IPA rinsing →15IPA rinsing →16IPA drying → Discharging.
Ultrasonic environmental solvent tank structure:
1. After the third tank is full, it spills forward and finally flows from the overflow port of the first tank to the distillation recovery tank. The solvent recovered after distillation is added to the third tank.
2. Drain valves are arranged at the bottom of each groove; The first groove is connected with the bottom of the second groove by a ball valve;
3. Tank and pipeline: 3/4 deep water is injected into each cleaning cylinder and tank, and there should be no leakage in each cylinder and liquid pipeline and valve after an hour.
Ultrasonic water cleaning tank:
1. Each tank is provided with four sides of the overflow port, the overflow tank is 35 mm wide, and each tank is an independent circulation tank, and the detergent is extracted from the liquid storage tank by the circulation pump after filtration and then transported back to the cleaning tank, that is, the child and the mother trough cycle;
2. Set up an independent circulation filter system;
3. Drain valves are arranged at the bottom of each groove and connected to the main pipe in series;
4. Temperature sensor is installed in the tank, temperature control range: RT-100℃;
5. Set the throwing motion outside the slot.
Ultrasonic IPA Steam drying tank:
The heating method of steam bath uses high-temperature oil (heat-conducting oil or steam), which is heated indirectly. Due to the high heating temperature of high-temperature oil and the uniform heating density of IPA, a uniform and sufficient steam density can be obtained to obtain good steaming bath effect and drying effect. Because of outsourcing indirect heating, high safety;
In order to reduce volatilization, reduce the cost of use, prevent the overflow of odor, and obtain a good cooling and drying effect. Therefore, the upper part is provided with sufficient cooling interval, and is divided into two layers of condensation pipe cooling, and the cooling source is provided by the chiller (provided by the demander). Adopt the form of "big belly woman";
Because IPA is easily soluble in water, the concentration will decrease after a certain time. In order to ensure the steaming bath and drying effect, it is necessary to replace IPA solution regularly. The replacement can be controlled through the ball valve and discharged to the waste liquid storage tank;
High precision surface cleaning in addition to the need for a reasonable cleaning process and configuration, but also need a good dehydration effect. If there are any dirt or water points on the surface of the workpiece, it will eventually affect the cleaning effect. IPA has a high boiling point, and can be better dissolved in water, after the effective dehydration of IPA in front and the steam bath of the tank, the workpiece surface has only IPA, after high temperature effectively dispersed, can achieve the purpose of high surface cleanliness and drying.