Hyperspectral filter ultrasonic cleaning Machine VGT-1209FH: A technological innovation in Precision optical cleaning

In the field of precision optical manufacturing, the cleanliness of a single filter often determines the success or failure of the entire optical system.

In the optical and semiconductor manufacturing industries, the cleanliness of hyperspectral filters directly determines the imaging quality and system performance. Such high-value optical components have extremely strict requirements for cleaning processes. Traditional cleaning methods are difficult to thoroughly remove micron-level contaminants without damaging the coating.

The VGT-1209FH ultrasonic cleaner from Vigot was born. Through multiple innovative technologies, it provides a safe and efficient cleaning solution for hyperspectral filters and redefines the cleaning standards for precision optical components.

Structural design: System engineering for precision cleaning

The VGT-1209FH takes into full account the special requirements of hyperspectral filters in its structural design. Every detail is aimed at balancing the cleaning effect and component safety.

The cleaning tank is made of 316L stainless steel and has undergone electrolytic polishing treatment to achieve a surface roughness of Ra≤0.1μm. The bottom of the inclined plane is designed with a spillway valve to effectively prevent particle deposition and facilitate the discharge of nano-scale pollutants.

In terms of the oscillator layout, the bottom of the equipment adopts 6 groups of piezoelectric ceramic transducers arranged in a honeycomb pattern, ensuring that the sound intensity deviation in the tank is less than 15%, which is far lower than the industry standard of 30%. This multi-oscillator layout ensures full coverage cleaning of large-sized filters, such as 8-inch wafer-level filters.

The filtration circulation system integrates a 5μm precision filter and a magnetic pump circulation to remove stripped particulate contaminants in real time and prevent secondary adsorption.

The customized fixture and cleaning basket are made of nylon coated material. The filter can be fixed at an Angle to prevent the coating from peeling off at the edge due to ultrasonic focusing. The suspended basket is suspended by a spring, reducing the risk of collision between the filter and the trough wall.

Cleaning performance: Precise strikes against multiple contaminants

The contaminants that hyperspectral filters encounter during production and processing are complex and diverse. The VGT-1209FH demonstrates outstanding cleaning capabilities for different types of contaminants.

For particulate contaminants, including polishing powder residues (cerium dioxide, aluminum oxide particles, particle size 0.5-5μm), environmental dust (silicon-based particles, carbon fiber debris), and electrostatically adsorbed particles (metal dust, PVD coating splashes), the high-frequency ultrasonic waves (120kHz) of the equipment can effectively remove sub-micron particles (0.1-1μm). At the same time, reduce surface scratches.

For organic contaminants such as fingerprints and sebum (mainly composed of triglycerides and fatty acids), cutting fluid/anti-rust oil (mineral oil, synthetic esters), and tape residue (acrylic glue, silicone), the intelligent constant temperature system (40-50℃) of the equipment can significantly improve the cleaning efficiency.

In the treatment of inorganic pollutants, including slight oxide layers (such as natural aluminum oxide on the surface of metal film filters) and process residual salts (such as residual sodium ions/potassium ions from cleaning agents before coating), the multi-stage sweep frequency technology of the equipment (automatically switching frequencies ±5kHz) can prevent uneven cleaning caused by standing wave effects.

Intelligent control: Easy operation and consistent cleaning guarantee

The intelligent control system of Vigot VGT-1209FH significantly reduces the operational difficulty and ensures the consistency of the cleaning effect of each batch of filters.

The equipment adopts a touch screen interface and can store 10 sets of cleaning parameters. Users can call up the appropriate cleaning plan with one click according to different types of filters. This preset parameter function is particularly suitable for batch production environments that require repetitive operations.

The PID temperature control system (20-60℃±1℃), in combination with an external cooling circulating water interface, can precisely control the temperature of the cleaning solution and prevent thermal stress cracks in the filter caused by sudden temperature changes. This function is particularly important for adhesive layer filters, as it can effectively prevent the risk of delamination.

The equipment is also equipped with overload protection and liquid shortage alarm functions, which enhance the safety and reliability of the equipment. Some models are more integrated with a TDS (Total Dissolved Solids) online monitoring system, with a resolution of 1ppm. When the pollutant concentration exceeds the preset threshold, the system automatically starts the filtration program.